CMOS-process compatible high-DC surface coating for capacitive detection and stimulation of biological tissues

Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation a...

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Bibliographische Detailangaben
Hauptverfasser: FROMHERZ PETER, JENKNER MARTIN, BIRKENMAIER TAMARA, GABL REINHARD, EVERSMANN BJORN-OLIVER, THEWES ROLAND, SCHREITER MATTHIAS, WERSING WOLFRAM
Format: Patent
Sprache:eng
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