CMOS-process compatible high-DC surface coating for capacitive detection and stimulation of biological tissues

Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation a...

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Bibliographische Detailangaben
Hauptverfasser:	FROMHERZ PETER, JENKNER MARTIN, BIRKENMAIER TAMARA, GABL REINHARD, EVERSMANN BJORN-OLIVER, THEWES ROLAND, SCHREITER MATTHIAS, WERSING WOLFRAM
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BEER BIOCHEMISTRY CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE CHEMISTRY COMPOSITIONS THEREOF CULTURE MEDIA DIAGNOSIS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENZYMOLOGY HUMAN NECESSITIES HYGIENE IDENTIFICATION INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEDICAL OR VETERINARY SCIENCE METALLURGY MICROBIOLOGY MICROORGANISMS OR ENZYMES MUTATION OR GENETIC ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PROPAGATING, PRESERVING OR MAINTAINING MICROORGANISMS SEMICONDUCTOR DEVICES SPIRITS SURGERY TESTING TRANSPORTING VINEGAR WINE
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Beschreibung
Zusammenfassung:	Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO2.