Intermediate suction support and its utilisation for producing a thin film structure

The present invention relates to an intermediate suction support. The support has at least one suction surface ( 62 ) intended to receive a first face of at least one substrate comprising an embrittled layer, a film thus being defined between the first face of the substrate and the embrittled layer,...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: BRUEL MICHEL, ASPAR BERNARD, JAUSSAUD CLAUDE
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present invention relates to an intermediate suction support. The support has at least one suction surface ( 62 ) intended to receive a first face of at least one substrate comprising an embrittled layer, a film thus being defined between the first face of the substrate and the embrittled layer, the suction surface ( 62 ) of the intermediate support being the face with at least one suction element ( 63 ) comprising suction means provided so that, when the embrittled layer is submitted to a treatment leading to the separation of the film from the rest of the substrate, the film can be recuperated. Application to the production of a thin film structure.