Micromechanical capacitive acceleration sensor

A micromechanical capacitive acceleration sensor is described for picking up the acceleration of an object in at least one direction. The sensor includes a frame structure ( 110 ), a sensor inertia mass ( 101 ) made of a wafer and movably mounted relative to the frame structure ( 110 ) about a rotat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SEIDEL HELMUT, TOELG SEBASTIAN, KNITTL PETER, WEINACHT MANFRED, PRECHTEL ULRICH, KAPSER KONRAD
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT LIGHTING LUBRICATING MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MECHANICAL ENGINEERING PHYSICS TESTING THERMAL INSULATION IN GENERAL WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!