Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby

Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby

A device for generating radiation or a source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anod...

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Bibliographische Detailangaben
Hauptverfasser: IVANOV VLADIMIR VITALEVITCH, GAYAZOV ROBERT RAFILEVITCH, KRIVTSUN VLADIMIR MIHAILOVITCH, ZUKAVISHVILI GIVI GEORGIEVITCH, KOROB EVGENII DMITREEVITCH, KOSHELEV KONSTANTIN NIKOLAEVITCH
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:A device for generating radiation or a source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode of cathode or on a separate material located in between the anode and cathode.