Cassette having separation plates for storing a plurality of semiconductor wafers

A cassette for storing a plurality of semiconductor wafers with a space in the vertical direction has a plurality of support plates which are provided spaced apart from one another in the vertical direction. A receiving cut-out having a shape corresponding to the shape of an adsorber for suction-hol...

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Bibliographische Detailangaben
1. Verfasser:	NANJO MASATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS COFFEE MILLS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING DOMESTIC ARTICLES OR APPLIANCES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FURNITURE HANDLING THIN OR FILAMENTARY MATERIAL HOUSEHOLD OR TABLE EQUIPMENT HUMAN NECESSITIES PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPICE MILLS SPRAYING OR ATOMISING IN GENERAL STORING SUCTION CLEANERS IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	A cassette for storing a plurality of semiconductor wafers with a space in the vertical direction has a plurality of support plates which are provided spaced apart from one another in the vertical direction. A receiving cut-out having a shape corresponding to the shape of an adsorber for suction-holding a semiconductor wafer are formed in the front half portion of each of the support plates. The cassette further comprises separation plates between adjacent support plates.