Alignment systems and methods for lithographic systems

An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determining unit is constructed to proces...

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Hauptverfasser:	HUIJBREGTSE JEROEN, VAN BILSEN FRANCISCUS BERNARDUS MARIA, VAN HAREN RICHARD JOHANNES FRANCISCUS, TOLSMA HOITE PIETER THEODOOR, BURGHOORN JACOBUS, SIMONS HUBERTUS JOHANNES GERTRUDUS, MEGENS HENRY, JEUNINK ANDRE BERNARDUS, SCHETS SICCO IAN, LEE BRIAN YOUNG BOK, DUNBAR ALLAN REUBEN, HINNEN PAUL CHRISTIAAN, SCHUURHUIS JOHNY RUTGER, VAN HORSSEN HERMANUS GERARDUS, KOREN RAMON NAVARRO Y
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DETECTING MASSES OR OBJECTS DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GEOPHYSICS GRAVITATIONAL MEASUREMENTS HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determining unit is constructed to process information from said first and second detector channels in a combination to determine a position of an alignment mark on a work piece, the combination taking into account a manufacturing process of the work piece. A lithographic apparatus has the above mentioned alignment system. Methods of alignment and manufacturing devices with a lithographic apparatus use the above alignment system and lithographic apparatus, respectively.