Optical displacement-measuring instrument

An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that comprises a first optical grating arranged close to a light source, a second optical grating arranged on the s...

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Bibliographische Detailangaben
1. Verfasser: OTSUKA TAKANORI
Format: Patent
Sprache:eng
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