Optical displacement-measuring instrument

An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that comprises a first optical grating arranged close to a light source, a second optical grating arranged on the s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	OTSUKA TAKANORI
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that comprises a first optical grating arranged close to a light source, a second optical grating arranged on the scale, and a third optical grating arranged in a photoreceptor. A light diffuser is arranged between the light source and the first optical grating. A collimated light from the light source is diffused at the light diffuser and led to the first optical grating.