X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned wafer

An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIKU ATSUNORI, NAKANO ASAO, MOTONO HIROSHI, KINEFUCHI TAKAO
Format:	Patent
Sprache:	eng
Schlagworte:	DIAGNOSIS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HUMAN NECESSITIES HYGIENE IDENTIFICATION INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEDICAL OR VETERINARY SCIENCE PHYSICS SURGERY TESTING X-RAY TECHNIQUE
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