X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned wafer

X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned wafer

An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on...

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Hauptverfasser: KIKU ATSUNORI, NAKANO ASAO, MOTONO HIROSHI, KINEFUCHI TAKAO
Format: Patent
Sprache:eng
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DIAGNOSIS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HUMAN NECESSITIES
HYGIENE
IDENTIFICATION
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEDICAL OR VETERINARY SCIENCE
PHYSICS
SURGERY
TESTING
X-RAY TECHNIQUE
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creator KIKU ATSUNORI
NAKANO ASAO
MOTONO HIROSHI
KINEFUCHI TAKAO
description An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.
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subjects DIAGNOSIS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HUMAN NECESSITIES
HYGIENE
IDENTIFICATION
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEDICAL OR VETERINARY SCIENCE
PHYSICS
SURGERY
TESTING
X-RAY TECHNIQUE
title X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned wafer
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