Polishing slurry for texturing

Polishing slurry for texturing the surface of a magnetic hard disk substrate has abrading particles with diameters in the range of 1-10 nm dispersed in a dispersant such as water and a water-based aqueous solution. The abrading particles may be monocrystalline diamond particles, polycrystalline diam...

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Hauptverfasser: OKUYAMA, HIROMITSU, TANIFUJI, TATSUYA, HORIE, YUJI
Format: Patent
Sprache:eng
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Zusammenfassung:Polishing slurry for texturing the surface of a magnetic hard disk substrate has abrading particles with diameters in the range of 1-10 nm dispersed in a dispersant such as water and a water-based aqueous solution. The abrading particles may be monocrystalline diamond particles, polycrystalline diamond particles or cluster particles with monoerystalline and polycrystalline diamond particles.