High density DRAM with reduced peripheral device area and method of manufacture

High density DRAM with reduced peripheral device area and method of manufacture

A dynamic random access memory (DRAM) structure having a distance less than 0.14 um between the contacts to silicon and the gate conductor is disclosed. In addition a method for forming the structure is disclosed, which includes forming the DRAM array contacts and the contacts to silicon simultaneou...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BAKER STEVEN M, MALDEI MICHAEL, BERRY, II JON S, COUSINEAU BRIAN, LEE JINHWAN, GERSTMEIER GUENTER
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A dynamic random access memory (DRAM) structure having a distance less than 0.14 um between the contacts to silicon and the gate conductor is disclosed. In addition a method for forming the structure is disclosed, which includes forming the DRAM array contacts and the contacts to silicon simultaneously.