Precision surface measurement

A test surface of a test object is measured with respect to a reference surface to generate a first relative surface measurement, where the test surface is in a first position relative to the reference surface. The test surface is measured with respect to the reference surface to generate a second r...

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Bibliographische Detailangaben
1. Verfasser:	KUHN WILLIAM P
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	A test surface of a test object is measured with respect to a reference surface to generate a first relative surface measurement, where the test surface is in a first position relative to the reference surface. The test surface is measured with respect to the reference surface to generate a second relative surface measurement, where the test surface is in a second position relative to the reference surface different from the first position. Estimates of a rotationally varying part of a measurement of the test surface and a rotationally varying part of a measurement of the reference surface are provided. An estimate of a rotationally invariant part of the measurement of the test surface is calculated at a plurality of radial values based on a combination of the relative surface measurements, the provided estimates, and a difference between the first and second relative positions.