Doped silica glass articles and methods of forming doped silica glass boules and articles

The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about 5 wt % and about 9 wt %; a coeffic...

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Bibliographische Detailangaben
Hauptverfasser: DAWES STEVEN B, HRDINA KENNETH E, FIACCO RICHARD M, WASILEWSKI MICHAEL H
Format: Patent
Sprache:eng
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Zusammenfassung:The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about 5 wt % and about 9 wt %; a coefficient of thermal expansion of between about -30 ppb/° C. and about +30 ppb/° C. at a temperature between 15° C. and 30° C.; and a variation in coefficient of thermal expansion of less than about 5 ppb/° C. at a temperature between 15° C. and 30° C.