High purity fluoropolymers

The invention relates to high purity fluoropolymers and processes for making such materials. These polymers are particularly suited for applications in the semiconductor industry. The process comprises removal of unstable polymer end groups by fluorination and removal of heavy metal impurities by ex...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BLONG THOMAS J, LOEHR GERNOT, DUCHESNE DENIS, KAULBACH RALPH, ZIPPLIES TILMAN, STRASSER HERBERT, KILLICH ALBERT
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to high purity fluoropolymers and processes for making such materials. These polymers are particularly suited for applications in the semiconductor industry. The process comprises removal of unstable polymer end groups by fluorination and removal of heavy metal impurities by extraction with an aqueous acid medium.