Mirror support mechanism and optical apparatus using the same
A fluid pressure support mechanism has a container in which fluid pressure is applied and fluid tubes are connected to the fluid pressure support mechanisms and to a fluid pressure control unit in such a way as to make all the fluid pressure support mechanisms communicate with each other, then a flu...
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Sprache: | eng |
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Zusammenfassung: | A fluid pressure support mechanism has a container in which fluid pressure is applied and fluid tubes are connected to the fluid pressure support mechanisms and to a fluid pressure control unit in such a way as to make all the fluid pressure support mechanisms communicate with each other, then a fluid pressure control unit applies the fluid pressure to the containers in the respective fluid pressure support mechanisms via the fluid tubes and controls the fluid pressure, and an electrically attractive actuator translates a mirror in an axial direction with one degree of freedom for translation by attracting force produced by a driven member and an electromagnet. |
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