Method for fabricating a transducer

A method for fabricating a transducer suitable for a fluidic drive for a miniature acoustic-fluidic pump or mixer that includes an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic a...

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Bibliographische Detailangaben
Hauptverfasser:	HORWITZ JAMES, KABLER MILTON N, BELL MICHAEL I, RIFE JACK C
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEATING LIGHTING LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MECHANICAL ENGINEERING MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING NON-POSITIVE DISPLACEMENT PUMPS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUBLIC ADDRESS SYSTEMS PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BYUSING INERTIA OF FLUID TO BE PUMPED PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SIPHONS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	A method for fabricating a transducer suitable for a fluidic drive for a miniature acoustic-fluidic pump or mixer that includes an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic acoustic wave in a fluid that in turn generates directed fluid motion through the effect of acoustic streaming. The method includes depositing a piezo-electric thin-film onto a platinum coated silicon wafer or substrate with capping electrodes, defining each separate transducer; and dicing said piezoelectric tin-film to provide individual transducers.