Self-aligned junction passivation for superconductor integrated circuit

A superconductor integrated circuit ( 1 ) includes an anodization ring ( 35 ) disposed around a perimeter of a tunnel junction region ( 27 ) for preventing a short-circuit between an outside contact ( 41 ) and the base electrode layer ( 18 ). The tunnel junction region ( 27 ) includes a junction contact ( 31 ) with a diameter of approximately 1.00 mum or less defined by a top surface of the counter electrode layer ( 24 ). The base electrode layer ( 18 ) includes an electrode isolation region ( 36 ) disposed approximately 0.8 mum in horizontal distance from the junction contact ( 31 ) for providing device isolation.