Customizing traveling wave optical modulators

In a method of fabricating a traveling wave optical modulator, an optical waveguide structure having an optical waveguide and a signal electrode path extending from a signal input to a termination output is formed. The signal electrode path is modified to include a customized signal electrode having...

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Hauptverfasser: AMPARAN ALFONSO BENJAMIN, GINES DAVID LEE
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In a method of fabricating a traveling wave optical modulator, an optical waveguide structure having an optical waveguide and a signal electrode path extending from a signal input to a termination output is formed. The signal electrode path is modified to include a customized signal electrode having a transmission line characteristic substantially matching a target transmission line parameter value. In another aspect, a traveling wave optical waveguide structure includes an optical waveguide and a signal electrode path. The signal electrode path extends from a signal input to a termination output and is defined by an electrode seed structure. The electrode seed structure is exposed for subsequent electrode formation and has a transmission line characteristic detrimental to proper propagation of an electrical modulation signal.