Strip conductor arrangement and method for producing a strip conductor arrangement

An interconnect arrangement comprises a substrate made from a first insulating material with a substrate surface, at least two interconnects which are arranged next to one another in the substrate, a buffer layer made from a second insulating material above the substrate and comprising a buffer-laye...

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Bibliographische Detailangaben
Hauptverfasser: SCHINDLER GUENTHER, PAMLER WERNER, GABRIC ZVONIMIR
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An interconnect arrangement comprises a substrate made from a first insulating material with a substrate surface, at least two interconnects which are arranged next to one another in the substrate, a buffer layer made from a second insulating material above the substrate and comprising a buffer-layer surface, which is parallel to the substrate surface, at least one cavity, which is arranged between the interconnects and, with respect to the buffer-layer surface, extends deeper into the substrate than the interconnects, and a covering layer made from a third insulating material, which is arranged above the buffer layer and completely closes off the cavity with respect to the buffer-layer surface.