Integrated spectroscopic microbolometer with microfilter arrays

A method for forming an integrated circuit includes providing an array of detectors proximate an outer surface of a first substrate layer. The array of detectors operate to detect the presence or absence of one or more wavelengths within a spectrum of transmitted energy. One or more filters are prov...

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Bibliographische Detailangaben
Hauptverfasser:	CHAHAL PREM, SYLLAIOS ATHANASIOS J
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A method for forming an integrated circuit includes providing an array of detectors proximate an outer surface of a first substrate layer. The array of detectors operate to detect the presence or absence of one or more wavelengths within a spectrum of transmitted energy. One or more filters are provided proximate a second substrate layer. The one or more filters operate to affect the spectrum of transmitted energy through the one or more filters. The second substrate layer is proximate to the outer surface of the first substrate layer to enclose the array of detectors in a vacuum environment.