Two axis state for microscope

A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base 1 , an X table 2 that can be moved in an X direction on the base 1 by an X feed screw 7 , and a Y table 3 that is supported on the X table 2 and movable in a Y direction. A third table 4 is disposed on the base 1 , the third table being movable in the Y direction by a Y-feed screw 8 positioned on the base 1 . Additionally, a slide unit 14 is disposed on the third table 4 , the slide unit 14 being movable in the X direction and connected with the Y table 3.