Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality

An integrated circuit is provided that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A...

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Hauptverfasser: SCHMIDT DENNIS ARTHUR, ZALESINSKI JERZY MARIA, KELLEY GORDON ARTHUR, BERTIN CLAUDE LOUIS, TONTI WILLIAM ROBERT
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creator SCHMIDT DENNIS ARTHUR
ZALESINSKI JERZY MARIA
KELLEY GORDON ARTHUR
BERTIN CLAUDE LOUIS
TONTI WILLIAM ROBERT
description An integrated circuit is provided that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A method of preparing such an integrated circuit having said coaxial signal line formed at least partially within a silicon-containing substrate is also disclosed herein.
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subjects BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
title Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality
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