Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality

An integrated circuit is provided that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A...

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Bibliographische Detailangaben
Hauptverfasser: SCHMIDT DENNIS ARTHUR, ZALESINSKI JERZY MARIA, KELLEY GORDON ARTHUR, BERTIN CLAUDE LOUIS, TONTI WILLIAM ROBERT
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An integrated circuit is provided that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A method of preparing such an integrated circuit having said coaxial signal line formed at least partially within a silicon-containing substrate is also disclosed herein.