Advances in spike anneal processes for ultra shallow junctions

Lamp based spike annealing was improved to address the aggressive requirements of

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Bibliographische Detailangaben
Hauptverfasser:	BOAS RYAN C, AL-BAYATI AMIR, GRAOUI HOUDA, RAMAMURTHY SUNDAR, RAMACHANDRAN BALASUBRAMANIAN, JALLEPALLY RAVI, SPEAR JOSEPH M
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	Lamp based spike annealing was improved to address the aggressive requirements of