Methods and systems for capacitive balancing of relative humidity sensors having integrated signal conditioning

Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separatin...

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Hauptverfasser: KIRKPATRICK, II RICHARD A, FOSTER RON, DAVIS RICHARD A, FOOTE STEVE R
Format: Patent
Sprache:eng
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Zusammenfassung:Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separating a common top plate and first and second bottom plates associated with a first and second capacitor, Cx1 and Cx2. For proper operation, the common top plate should be in capacitive balance. Capacitive balance can be achieved by creating voids within and/or along the common top plate of the sensor. A system for creating voids can include a precision cutting instrument, a measuring device for enabling the measurement of capacitance of at least one of the common series capacitive circuit, Cx1 and Cx2, and power provided from a voltage source.