Inspection system for circuit patterns and a method thereof

In order to provide a high-speed, inexpensive inspection system that has a short development period, that is flexible, and that allow algorithms to be easily changed, a PC equipped with an image input feature is used to capture an image detected by a line image sensor, this detected image is transfe...

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Hauptverfasser: KOBAYASHI HARUOMI, KOSHISHIBA HIROYA, ISOBE MITSUNOBU, SHISHIDO CHIE, YOSHIMURA KAZUSHI, DOI HIDEAKI
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creator KOBAYASHI HARUOMI
KOSHISHIBA HIROYA
ISOBE MITSUNOBU
SHISHIDO CHIE
YOSHIMURA KAZUSHI
DOI HIDEAKI
description In order to provide a high-speed, inexpensive inspection system that has a short development period, that is flexible, and that allow algorithms to be easily changed, a PC equipped with an image input feature is used to capture an image detected by a line image sensor, this detected image is transferred to a plurality of PCs connected by a LAN, and defects are detected using software processing on the plurality of PCs.
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subjects CALCULATING
COMPUTING
COUNTING
HANDLING RECORD CARRIERS
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
PRESENTATION OF DATA
RECOGNITION OF DATA
RECORD CARRIERS
title Inspection system for circuit patterns and a method thereof
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