Inspection system for circuit patterns and a method thereof

Inspection system for circuit patterns and a method thereof

In order to provide a high-speed, inexpensive inspection system that has a short development period, that is flexible, and that allow algorithms to be easily changed, a PC equipped with an image input feature is used to capture an image detected by a line image sensor, this detected image is transfe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOBAYASHI HARUOMI, KOSHISHIBA HIROYA, ISOBE MITSUNOBU, SHISHIDO CHIE, YOSHIMURA KAZUSHI, DOI HIDEAKI
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
HANDLING RECORD CARRIERS
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
PRESENTATION OF DATA
RECOGNITION OF DATA
RECORD CARRIERS
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Beschreibung
Zusammenfassung:In order to provide a high-speed, inexpensive inspection system that has a short development period, that is flexible, and that allow algorithms to be easily changed, a PC equipped with an image input feature is used to capture an image detected by a line image sensor, this detected image is transferred to a plurality of PCs connected by a LAN, and defects are detected using software processing on the plurality of PCs.