High speed waveguide photodetector

The present invention relates to a semiconductor photodetector. The photodetector is a waveguide photodetector, which comprises: a waveguide (1,2,3) having a III-V ridge structure including an active layer (1); a semiconductor layer (4) deposited on top of the ridge structure; and, metal detector el...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHAN YUEN CHUEN, LAM YEE LOY, WEE CHAI LENG TERENCE
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to a semiconductor photodetector. The photodetector is a waveguide photodetector, which comprises: a waveguide (1,2,3) having a III-V ridge structure including an active layer (1); a semiconductor layer (4) deposited on top of the ridge structure; and, metal detector electrodes (not shown) on the surface of the higher refractive index semiconductor layer (4). The semiconductor layer (4) has a higher refractive index than the waveguide structure (1,2,3). The ridge structure is configured to widen along the length of the waveguide (1,2,3) such that light passing through the active layer (1) of the waveguide couples more efficiently up into the higher refractive index semiconductor layer (4).