Polysilicon linewidth measurement structure with embedded transistor
A semiconductor device includes a grating structure having a plurality of parallel lines, and at least one of the multiple parallel lines is a gate electrode line of a transistor, which includes source/drain regions proximate to the gate electrode line, and vias extending to the gate electrode line...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A semiconductor device includes a grating structure having a plurality of parallel lines, and at least one of the multiple parallel lines is a gate electrode line of a transistor, which includes source/drain regions proximate to the gate electrode line, and vias extending to the gate electrode line and the source/drain regions. A method of manufacturing the semiconductor device is also disclosed. |
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