Processing method and processing apparatus

After the first workpieces have been processed in the first process portion while the second workpieces are being processed in the second process portion, the first process portion in which the first process condition has been set for the third process condition. By repeating such processes, a plura...

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Bibliographische Detailangaben
1. Verfasser: TATEYAMA KIYOHISA
Format: Patent
Sprache:eng
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Zusammenfassung:After the first workpieces have been processed in the first process portion while the second workpieces are being processed in the second process portion, the first process portion in which the first process condition has been set for the third process condition. By repeating such processes, a plurality of workpieces can be successively processed in different types of process conditions.