Guides lithographically fabricated on semiconductor devices

Guides lithographically fabricated on semiconductor devices

A structure that includes a substrate, typically a semiconductor chip such as a VCSEL or photodetector chip, and a guide for aligning a signal conveying device, typically an optical fiber, to a transducer such as an optoelectronic device on the semiconductor chip. The guide is formed, in a preferred...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: COHEN MITCHELL S, HOGAN WILLIAM K, JOHNSON GLEN W, KUCHTA DANIEL M, ZINTER JOSEPH P, TREWHELLA JEANNINE M, CORDES STEVEN A, SPEIDELL JAMES L, LACEY DIANNE L, CORDES MICHAEL J
Format: Patent
Sprache:eng
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:A structure that includes a substrate, typically a semiconductor chip such as a VCSEL or photodetector chip, and a guide for aligning a signal conveying device, typically an optical fiber, to a transducer such as an optoelectronic device on the semiconductor chip. The guide is formed, in a preferred embodiment, by lithographically exposing and developing a thick layer of photoresist. The structure is assembled by placing and securing the signal conveying device into a cavity-like region of the guide.