Method and apparatus for proactive dispatch system to improve line balancing

A method, apparatus, and system is provided for a proactive dispatch system to improve line balancing. At least one request for processing a semiconductor wafer is received. A line-balancing analysis based upon the request is performed. At least one semiconductor wafer based upon the line-balancing...

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Bibliographische Detailangaben
Hauptverfasser: ALLEN, JR. SAM H, CONBOY MICHAEL R, GROVER JASON A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method, apparatus, and system is provided for a proactive dispatch system to improve line balancing. At least one request for processing a semiconductor wafer is received. A line-balancing analysis based upon the request is performed. At least one semiconductor wafer based upon the line-balancing analysis is processed.