Power splitter for plasma device

The invention concerns a system including a microwave generator and a rectangular guide connected with the generator. The system is adapted to operate in fundamental (H10) or transverse electrical (TE10) mode, and associated with means providing a standing wave pattern. The system also includes many...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LACOSTE ANA, MOISAN MICHEL, PELLETIER JACQUES, LAGARDE THIERRY LEON, ARNAL YVES ALBAN-MARIE, ZAKRZEWSKI ZENON
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention concerns a system including a microwave generator and a rectangular guide connected with the generator. The system is adapted to operate in fundamental (H10) or transverse electrical (TE10) mode, and associated with means providing a standing wave pattern. The system also includes many power connectors arranged in the guide at zones of maximum amplitude for one of the components of the electromagnetic field for splitting the generator power. The power connectors are adjusted so that the sum of their reduced admittance levels brought to the splitter input formed by the guide is in a single unit and many sources, respectively connected to a connector of the guide, via insulating means ensuring a power transmission of the connector to the source without reflecting towards the connector and a device adapting impedance of each source, located downstream of the insulating means, between the latter and associated source.