Electrode structure and method for forming electrode structure for a flat panel display

An electrode structure for a display that includes lower electrodes and upper electrodes. In one embodiment, lower and upper electrodes are formed of either an aluminum alloy or a silver alloy. In another embodiment, upper and lower electrodes are formed using a metal alloy layer over which a claddi...

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Bibliographische Detailangaben
Hauptverfasser: KNALL JOHAN, LEE JUENG GIL, CHAKRAVORTY KISHORE K, BONN MATTHEW A, SPINDT CHRISTOPHER J
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An electrode structure for a display that includes lower electrodes and upper electrodes. In one embodiment, lower and upper electrodes are formed of either an aluminum alloy or a silver alloy. In another embodiment, upper and lower electrodes are formed using a metal alloy layer over which a cladding layer is deposited. A silicon nitride passivation layer is used to protect the upper electrodes from damage in subsequent process steps. Various other materials and structures are also disclosed that protect the upper electrodes from damage in subsequent process steps.