Real time monitor method and system for extraction electrode

A method and apparatus for monitoring an extraction electrode utilized in the implantation of charged particles (i.e., ions) on a semiconductor wafer. A signal may be generated from an encoder associated with the extraction electrode, wherein the signal comprises data indicative of charged particles...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE CHENUN, FAN CHUN-HUEI, WANG CHIHIEH, CHANG HON-YI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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