Combined chemical mechanical planarization and cleaning

Specific embodiments of the present invention provide a method for chemical-mechanical planarization of an object. The method comprises performing a first planarization of the object using a first polishing pad having a smaller surface area than the object being planarized in a processing module; and cleaning the object in the processing module. In some embodiments, cleaning the object comprises scrubbing the object. The object may be scrubbed using a PVA sponge. Cleaning the object may comprise applying ultrasonic energy to the object. The ultrasonic energy may be applied to the object using an ultrasonic wand, ultrasonic shower, or an ultrasonic nozzle. In specific embodiments, the object is precleaned in the processing module, and the object is cleaned in a separate cleaning module. Prior to cleaning the object in the processing module, a second planarization of the object may be performed using a second polishing pad having a smaller surface area than the object being planarized in the processing module. The second polishing pad may be different in fineness from the first polishing pad.