Optical mirror and optical scanner and laser machining apparatus using the same

A reliable galvano-mirror employed for laser machining is disclosed. The mirror is far reduced its weight for getting a higher rotation. On the rear surface of the mirror, a lightweight rib-structure, which is formed from a mirror support beam centered across the surface and some ribs extending from...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KARASAKI HIDEHIKO, KAWAZOE KIMIKO
Format: Patent
Sprache:eng
Schlagworte:
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