Optical mirror and optical scanner and laser machining apparatus using the same

A reliable galvano-mirror employed for laser machining is disclosed. The mirror is far reduced its weight for getting a higher rotation. On the rear surface of the mirror, a lightweight rib-structure, which is formed from a mirror support beam centered across the surface and some ribs extending from...

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Bibliographische Detailangaben
Hauptverfasser:	KARASAKI HIDEHIKO, KAWAZOE KIMIKO
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	A reliable galvano-mirror employed for laser machining is disclosed. The mirror is far reduced its weight for getting a higher rotation. On the rear surface of the mirror, a lightweight rib-structure, which is formed from a mirror support beam centered across the surface and some ribs extending from the beam, holds the mirror. Against a distortion occurred in rotating at high speed, the mirror is provided with a high rigidity. And the mirror is structured integrally with the motor shaft holder. Besides, a slit is formed between the rib disposed close to the holder and the support beam centered across the rear surface of the mirror. Providing slit enables to minimize a local distortion caused by a stress from fastening screws to attach the mirror to the motor shaft.