Electrically conductive ceramic material, a process of producing same, and an electrostatic chuck

An electrically conductive ceramics comprises a compound containing at least one element belonging to the Group 3A of the periodic table and TiO2-x (0

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Bibliographische Detailangaben
Hauptverfasser:	MATSUO HIROYUKI, ISHII MAMORU, SAITOH KAZUNORI, ISHIDA HIRONORI, MINAMISAWA KAZUYOSHI, SUZUKI HIROSHI, ENDOH SARI, UMEZU MOTOHIRO, KISHI YUKIO, SHIRAKAWA YOUICHI, SASHIDA NORIKAZU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An electrically conductive ceramics comprises a compound containing at least one element belonging to the Group 3A of the periodic table and TiO2-x (0