Plasma reactor having an inductive antenna coupling power through a parallel plate electrode

A plasma reactor for processing a workpiece includes a reactor enclosure defining a processing chamber, a base within the chamber for supporting the workpiece during processing thereof, a semiconductor window electrode overlying the base, a gas inlet system for admitting a plasma precursor gas into...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	ASKARINAM ERIC, RICE MICHAEL, TROW JOHN, TSUI JOSHUA CHIU-WING, HUNG RAYMOND, COLLINS KENNETH S, BUCHBERGER DOUGLAS, GROECHEL DAVID W
Format:	Patent
Sprache:	eng
Schlagworte:	BAKERY PRODUCTS BAKING BASIC ELECTRIC ELEMENTS CHEWING GUM COCOA COCOA PRODUCTS, e.g. CHOCOLATE CONFECTIONERY EDIBLE DOUGHS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FOODS OR FOODSTUFFS FOODS, FOODSTUFFS, OR NON-ALCOHOLIC BEVERAGES, NOT COVERED BYSUBCLASSES A23B - A23J HUMAN NECESSITIES ICE-CREAM PLASMA TECHNIQUE PREPARATION THEREOF PRESERVATION OF FOODS OR FOODSTUFFS, IN GENERAL PRESERVATION THEREOF PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES SUBSTITUTES FOR COCOA OR COCOA PRODUCTS THEIR PREPARATION OR TREATMENT, e.g. COOKING, MODIFICATION OFNUTRITIVE QUALITIES, PHYSICAL TREATMENT THEIR TREATMENT, NOT COVERED BY OTHER CLASSES TREATMENT, e.g. PRESERVATION, OF FLOUR OR DOUGH, e.g. BYADDITION OF MATERIALS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A plasma reactor for processing a workpiece includes a reactor enclosure defining a processing chamber, a base within the chamber for supporting the workpiece during processing thereof, a semiconductor window electrode overlying the base, a gas inlet system for admitting a plasma precursor gas into the chamber, an electrical terminal coupled to the semiconductor window electrode, an inductive antenna adjacent one side of the semiconductor window electrode opposite the base for coupling power into the interior of said chamber through the semiconductor window electrode.