Spectroplarimetric reflectometer

A spectropolarimetric reflectometer for measuring polarimetric reflection properties of materials over broad spectral wavelength regions is described wherein radiation from a Fourier transform spectrometer passes through a set of polarization elements that serve as a polarization state generator and...

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Bibliographische Detailangaben
Hauptverfasser: GOLDSTEIN DENNIS H, OWENS MONTE, CHENAULT DAVID B
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A spectropolarimetric reflectometer for measuring polarimetric reflection properties of materials over broad spectral wavelength regions is described wherein radiation from a Fourier transform spectrometer passes through a set of polarization elements that serve as a polarization state generator and is reflected off the sample and collected by optics that includes a polarization state analyzer, focusing mirror and detector.