Spectroplarimetric reflectometer
A spectropolarimetric reflectometer for measuring polarimetric reflection properties of materials over broad spectral wavelength regions is described wherein radiation from a Fourier transform spectrometer passes through a set of polarization elements that serve as a polarization state generator and...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A spectropolarimetric reflectometer for measuring polarimetric reflection properties of materials over broad spectral wavelength regions is described wherein radiation from a Fourier transform spectrometer passes through a set of polarization elements that serve as a polarization state generator and is reflected off the sample and collected by optics that includes a polarization state analyzer, focusing mirror and detector. |
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