Laser-assisted silicide fuse programming

A method is provided, the method comprising programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser.

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1. Verfasser: TSUI TING YIU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method is provided, the method comprising programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser.