Laser-assisted silicide fuse programming
A method is provided, the method comprising programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method is provided, the method comprising programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser. |
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