Methods and apparatus for delivering high purity liquids with low vapor pressure

Methods and apparatus for delivery of high purity reactive liquids using gaseous assist are described, the apparatus comprising a container body, the container body having fluidly connected thereto a gas inlet and a reactive liquid outlet, the gas inlet fitted with a means adapted to hold a gas filt...

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Bibliographische Detailangaben
1. Verfasser:	JURSICH GREGORY M
Format:	Patent
Sprache:	eng
Schlagworte:	BOTTLES, JARS OR SIMILAR CONTAINERS DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR LIQUID HANDLING OPENING, CLOSING PERFORMING OPERATIONS TRANSPORTING
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Beschreibung
Zusammenfassung:	Methods and apparatus for delivery of high purity reactive liquids using gaseous assist are described, the apparatus comprising a container body, the container body having fluidly connected thereto a gas inlet and a reactive liquid outlet, the gas inlet fitted with a means adapted to hold a gas filter media, and a gas filter media positioned within said means adapted to hold a gas filter media, the gas inlet having a gas inlet valve, the liquid outlet having a liquid outlet valve.