Time-lapsed IC defect analysis using liquid crystal

Defect analysis of an integrated circuit die is enhanced using a method and system that make possible the detection of defect-related heat generation in the die. According to an example embodiment of the present invention, a semiconductor die having a liquid crystal layer is analyzed by detecting a...

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Bibliographische Detailangaben
1. Verfasser: EPPES DAVID HARRY
Format: Patent
Sprache:eng
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Zusammenfassung:Defect analysis of an integrated circuit die is enhanced using a method and system that make possible the detection of defect-related heat generation in the die. According to an example embodiment of the present invention, a semiconductor die having a liquid crystal layer is analyzed by detecting a liquid crystal phase change caused by heating the die. The heating causes a first circuit region and a second circuit region to effect a separate phase change in corresponding areas of the liquid crystal layer. A detector is adapted to use time-lapsed analysis to detect the liquid crystal phase change in the area corresponding to the second circuit region before the corresponding areas cease to be separately detectable.