Silicon interposer and multi-chip-module (MCM) with through substrate vias

An integrated circuit package which includes an integrated circuit that is connected to a silicon substrate. The silicon substrate may have a via. The package may further include a solder bump that is attached to both the integrated circuit and the silicon subtstrate. The silicon substrate has a coe...

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Bibliographische Detailangaben
Hauptverfasser: MA QING, FUJIMOTO HARRY
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An integrated circuit package which includes an integrated circuit that is connected to a silicon substrate. The silicon substrate may have a via. The package may further include a solder bump that is attached to both the integrated circuit and the silicon subtstrate. The silicon substrate has a coefficient of thermal expansion that matches the coefficient of thermal expansion of the integrated circuit.