Device for simultaneously separating a multiplicity of wafers from a workpiece

A device for simultaneously separating a multiplicity of wafers from a hard brittle workpiece having a longitudinal axis, with a wire web made from saw wire and with an advancing device which brings about a translational relative movement, which is perpendicular to the longitudinal axis of the workp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WIESE ULRICH, GREIM JOCHEN, HOLZMULLER BERNHARD
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A device for simultaneously separating a multiplicity of wafers from a hard brittle workpiece having a longitudinal axis, with a wire web made from saw wire and with an advancing device which brings about a translational relative movement, which is perpendicular to the longitudinal axis of the workpiece, between the workpiece and the wire web of the wire saw, in the course of which movement the workpiece is passed through the wire web, wherein the wire web is formed from a multiplicity of individual wires, and wherein there is a device for holding and rotating the workpiece about the longitudinal axis.