Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly

A combination of a ceramic layer essentially consisting of magnesia ceramic material and a metallic layer is proposed for a layered assembly for use in applications such as electrostatic chucks which are subjected to thermal stress. A combination of magnesia ceramic material and ferritic stainless s...

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Bibliographische Detailangaben
Hauptverfasser:	INOKUCHI TADASHI, HANAMACHI TOSHIHIKO, KAYAMOTO TAKASHI, ADACHI RYUSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS REFRACTORIES SEMICONDUCTOR DEVICES SLAG TRANSPORTING TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	A combination of a ceramic layer essentially consisting of magnesia ceramic material and a metallic layer is proposed for a layered assembly for use in applications such as electrostatic chucks which are subjected to thermal stress. A combination of magnesia ceramic material and ferritic stainless steel is preferred because of the similarities of the thermal expansion coefficients of these materials. When a larger difference in the thermal expansion coefficients exists between the selected combination of materials, a damper layer having an intermediate thermal expansion coefficient may be used so as to accommodate the difference in the thermal expansion of the two layers.