Device and method for testing performance of silicon structures
An integrated test circuit for a silicon on insulator circuit structure is formed on the same wafer as the circuit structure. The wafer includes an input circuit coupled to the silicon on insulator circuit structure which generates a drive signal for operating the silicon on insulator circuit struct...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An integrated test circuit for a silicon on insulator circuit structure is formed on the same wafer as the circuit structure. The wafer includes an input circuit coupled to the silicon on insulator circuit structure which generates a drive signal for operating the silicon on insulator circuit structure and an output circuit which processes a response signal from the circuit structure to generate an output signal representing certain characteristics of the silicon on insulator circuit structure. |
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